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SYNTHESIS OF SIC FROM MICROWAVE-DRIED SILICON SLUDGE AND APPLICATION OF MICROWAVE-DRIED SILICON SLUDGE

机译:微波干燥硅渣的SIC合成及微波干燥硅渣的应用

摘要

The present invention relates to a synthesis method for silicon carbide powders from silicon sludge. The present invention provides the synthesis method for silicon carbide from sludge generated when a silicon wafer is cut off comprising: a step of providing silicone sludge including silicone and silicon carbide; a step of centrifuging the solid content of the silicone sludge; a drying step of removing oil by heating the centrifuged silicon sludge with microwave in the inert atmosphere of a microwave chamber; and a step of making the mixture react and sintering the mixture. The present invention is able to manufacture sintered silicon carbide at low synthesis temperatures from silicon sludge. [Reference numerals] (116) O2 sensor; (120) Controller
机译:从硅泥中合成碳化硅粉的方法技术领域本发明涉及一种由硅泥中合成碳化硅粉的方法。本发明提供了一种由硅晶片被切割时产生的污泥合成碳化硅的方法,包括:提供包括硅酮和碳化硅的硅泥的步骤;离心有机硅污泥的固体成分的步骤;干燥步骤,通过在微波室的惰性气氛中用微波加热离心的硅泥来除去油;使混合物反应并烧结混合物的步骤。本发明能够在低合成温度下由硅泥制造碳化硅烧结体。 [附图标记](116)O2传感器; (120)控制器

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