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RETICLE CHUCK CLEANER AND RETICLE CHUCK CLEANING METHOD
RETICLE CHUCK CLEANER AND RETICLE CHUCK CLEANING METHOD
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机译:十字盘清洁器和十字盘清洁方法
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摘要
There is provided a reticle chuck cleaner A for cleaning a reticle chuck of an apparatus, as a reticle chuck cleaner that allows easy cleaning of a reticle chuck in a vacuum chamber of an apparatus without exposing the chamber to the atmosphere and contributes to improvement of the operating ratio of the apparatus, including: an adhesive layer 1 to be adhered to a chuck region of the reticle chuck; a support layer 2 laminated on the adhesive layer 1; and a substrate 3 having a shape capable of being carried to the reticle chuck, the support layer 2 and the substrate 3 being partially bonded together in an adhesive region 41 of a partial adhesive layer 4.
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