首页>
外国专利>
Probe array integrated component defect inspection method and induced by operation of said probe array currents.
Probe array integrated component defect inspection method and induced by operation of said probe array currents.
展开▼
机译：探针阵列集成部件缺陷检查方法并由所述探针阵列电流的操作引起。
展开▼
页面导航
摘要
著录项
相似文献
摘要
a probe array comprising at least one sensor array (2), with a set of individual sensors (S) formed in layers (Ci) of a substrate arranged multilayer (SCn) and aligned in at least two rows is provided ( 3, 4), these sensors being adapted to switch between a transmitting state and a receiving state via a respective multiplexer unit transmitter / receiver (TX MUX, MUX RX) governed by a control circuit (CTRL). The probe comprises a first flexible portion (5), essentially laminar, bearing the sensor array (2) and a first rigid portion (6), also essentially laminar, integrating multiplexers blocks, the control circuit and an amplifier device ( AMP) to raise the level of signal from the receiver multiplexer unit (MUX RX); and said flexible and rigid part said being joined to form a single circuit assembly rigiflex type.
展开▼
