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Non-transitory computer-readable storage medium, decision method and computer for deciding exposure condition using evaluation item of interest and auxiliary evaluation item
Non-transitory computer-readable storage medium, decision method and computer for deciding exposure condition using evaluation item of interest and auxiliary evaluation item
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机译：非暂时性计算机可读存储介质，用于确定使用关注评估项目和辅助评估项目的曝光条件的方法和计算机
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摘要
The present invention provides a non-transitory computer-readable storage medium storing a program that causes a computer to decide an exposure condition in an exposure apparatus, the program causing the computer to execute a step of selecting an evaluation item of interest from a plurality of evaluation items to be used to evaluate an image formed on an image plane of a projection optical system in correspondence with the exposure condition, a step of selecting, as an auxiliary evaluation item, an evaluation item which is different from the evaluation item of interest and changes a value in the same direction as that of a change in a value of the evaluation item of interest upon changing parameter values included in the exposure condition, and a step of setting an evaluation function including the evaluation item of interest and the auxiliary evaluation item as values.
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