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Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device
Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device
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机译：极紫外光源装置中的辐照度分布的检测方法及极紫外光源装置
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摘要
An extreme ultraviolet light source device, comprising a collector mirror focusing extreme ultraviolet radiation at a focal point, wherein a porous plate having a plurality of through holes arranged such that only radiation focusing at said focal point passes is provided insertably between said collector mirror and said focal point on an optical axis of said collector mirror, and a detection means is provided to receive radiation having passed through said porous plate and to detect an intensity of said received radiation, and a method for detecting an irradiance distribution in an extreme ultraviolet light source device.
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