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SUPERIOR STABILITY OF CHARACTERISTICS OF TRANSISTORS HAVING AN EARLY FORMED HIGH-K METAL GATE

机译:具有早已形成的高K金属门的晶体管的特性的超稳定性

摘要

When forming sophisticated transistors on the basis of a high-k metal gate electrode structure and a strain-inducing semiconductor alloy, a superior wet cleaning process strategy is applied after forming cavities in order to reduce undue modification of sensitive gate materials, such as high-k dielectric materials, metal-containing electrode materials and the like, and modification of a threshold voltage adjusting semiconductor alloy. Thus, the pronounced dependence of the threshold voltage of transistors of different width may be significantly reduced compared to conventional strategies.
机译:当基于高k金属栅电极结构和应变感应半导体合金形成复杂的晶体管时,在形成腔体后应采用卓越的湿法清洗工艺策略,以减少敏感栅材料的过度修饰,例如高k种介电材料,含金属的电极材料等,以及阈值电压调整用半导体合金的变形。因此,与常规策略相比,可以显着降低不同宽度的晶体管的阈值电压的明显依赖性。

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