首页> 外国专利> Linearized control of piezoelectric actuator to reduce hysteresis

Linearized control of piezoelectric actuator to reduce hysteresis

机译:压电致动器的线性化控制,以减少磁滞

摘要

An exemplary piezoelectric actuator includes a piezoelectric transducer that exhibits displacements when energized with corresponding voltages. A control system is electrically connected to the piezoelectric transducer so as to provide the transducer with the voltages. The control system includes feedback of displacements of the transducer as functions of respective voltage commands and feed-forward of electrical currents passing through the transducer as functions of the respective voltages applied to the transducer. The control system further has a feedback controller connected to receive transducer-displacement data corresponding to the voltages applied to the transducer. The control system further can include a current-feed-forward amplifier connected to receive transducer-current data corresponding to the voltages applied to the transducer. Such a control system facilitates reduction of hysteresis in controlled actuation of the actuator.
机译:示例性的压电致动器包括压电换能器,当以相应的电压激励时,该压电换能器表现出位移。控制系统电连接到压电换能器,以便为换能器提供电压。该控制系统包括作为相应电压指令的函数的换能器的位移的反馈以及作为施加到换能器的相应电压的函数的通过换能器的电流的前馈。该控制系统还具有反馈控制器,该反馈控制器连接成接收与施加到换能器的电压相对应的换能器位移数据。控制系统还可以包括电流前馈放大器,该电流前馈放大器连接成接收与施加到换能器的电压相对应的换能器电流数据。这样的控制系统有助于减小致动器的受控致动中的磁滞。

著录项

  • 公开/公告号US8836252B2

    专利类型

  • 公开/公告日2014-09-16

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;

    申请/专利号US201213656909

  • 发明设计人 SUSUMU ISAGO;YI-PING HSIN;BAUSAN YUAN;

    申请日2012-10-22

  • 分类号H01L41/09;

  • 国家 US

  • 入库时间 2022-08-21 16:05:21

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号