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Being the constituent for chemical machine grinding which contains the iodate and the constituent for chemical machine
Being the constituent for chemical machine grinding which contains the iodate and the constituent for chemical machine
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机译:是包含碘酸盐和化学机械成分的化学机械研磨成分
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摘要
The invention provides compositions and methods for planarizing or polishing a substrate. The composition comprises an abrasive, iodate ion, a nitrogen-containing compound selected from the group consisting of a nitrogen-containing C4-20 heterocycle and a C1-20 alkylamine, and a liquid carrier comprising water.
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