首页> 外国专利> DISPLACEMENT SENSOR, SPECTRAL CHARACTERISTICS MEASUREMENT DEVICE, COLOR MEASUREMENT DEVICE, PLANAR MEASUREMENT OBJECT QUALITY MONITOR, DISPLACEMENT MEASUREMENT METHOD, SPECTRAL CHARACTERISTICS MEASUREMENT METHOD, AND COLOR MEASUREMENT METHOD, USING SPECTROMETER

DISPLACEMENT SENSOR, SPECTRAL CHARACTERISTICS MEASUREMENT DEVICE, COLOR MEASUREMENT DEVICE, PLANAR MEASUREMENT OBJECT QUALITY MONITOR, DISPLACEMENT MEASUREMENT METHOD, SPECTRAL CHARACTERISTICS MEASUREMENT METHOD, AND COLOR MEASUREMENT METHOD, USING SPECTROMETER

机译:位移传感器,光谱特征测量设备,颜色测量设备,平面测量对象质量监控器,位移测量方法,光谱特征测量方法和颜色测量方法(使用光谱仪)

摘要

PROBLEM TO BE SOLVED: To constitute a displacement sensor using a spectrometer.SOLUTION: The displacement sensor for measuring a displacement in a measurement region of a planar measurement object, comprises: a light source unit for irradiating a plane including the measurement region with light of wavelength correspondingly changing with an irradiation direction in an oblique direction to the plane; a spectrometer for measuring a spectral distribution of light reflected from the measurement region; a feature quantity extraction unit for extracting a feature quantity of the spectral distribution; and a displacement calculation unit for calculating a displacement in the measurement region on the basis of the extracted feature quantity and a previously acquired relationship between a feature quantity and a displacement.
机译:解决的问题:使用分光计构成位移传感器。解决方案:用于测量平面测量对象的测量区域中的位移的位移传感器,包括:光源单元,用于向包括测量区域的平面照射光。在相对于平面倾斜的方向上,随着照射方向而变化的波长。用于测量从测量区域反射的光的光谱分布的光谱仪;特征量提取单元,用于提取光谱分布的特征量;位移计算单元,用于基于所提取的特征量和先前获取的特征量与位移之间的关系来计算测量区域中的位移。

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