PROBLEM TO BE SOLVED: To provide an optical defect detection classification method capable of excluding a defect repaired in a previous step from defects detected in a present step and capable of improving defect detection/classification accuracy.;SOLUTION: In the optical defect detection classification method, repaired data of a defect (205) concerned with first processing which is repaired in a previous step A-2 are excluded from defect data of defects (205, 206, 207) detected by optically inspecting an inspection target (L) applied to second processing (B-1) and the defect data left after the exclusion are extracted as defect data of the defects generated in a present step. Consequently second detection of the repaired defect (205) as a defect can be avoided, useless increases in a detection frequency of defects and defect sorts can be suppressed and detection accuracy and classification accuracy of defects can be improved.;COPYRIGHT: (C)2014,JPO&INPIT
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