首页> 外国专利> MANUFACTURING METHOD OF HETERO-EPITAXIAL SINGLE CRYSTAL, MANUFACTURING METHOD OF HETEROJUNCTION SOLAR CELL, HETERO-EPITAXIAL SINGLE CRYSTAL, AND HETEROJUNCTION SOLAR CELL

MANUFACTURING METHOD OF HETERO-EPITAXIAL SINGLE CRYSTAL, MANUFACTURING METHOD OF HETEROJUNCTION SOLAR CELL, HETERO-EPITAXIAL SINGLE CRYSTAL, AND HETEROJUNCTION SOLAR CELL

机译:异质外延单晶的制造方法,异质结太阳电池的制造方法,异质外延单晶的晶体,异质结太阳电池

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a hetero-epitaxial single crystal with which, when growing, on a substrate of a single crystal, a thin film of a single crystal of which the grating constant is different from that of the substrate, grating defects in the thin film are reduced, a manufacturing method of a heterojunction solar cell employing the same, the hetero-epitaxial single crystal and the heterojunction solar cell.SOLUTION: According to the manufacturing method of the hetero-epitaxial single crystal, by forming an opening 13 in a mask layer 12 formed on a substrate 10, an exposed surface 14 of the substrate 10 is formed on a bottom face of the opening 13 and a silicon single crystal 20 of which a lattice constant is different from that of the substrate 10 is grown on the exposed surface 14 after an outline of the exposed surface 14. A width dimension of the exposed surface 14 is made equal to or less than a width dimension of the exposed surface 14 in the case where a destruction strength of the silicon crystal 20 becomes equal to a stress accompanying lattice strain received from the substrate 10.
机译:解决的问题:提供一种异质外延单晶的制造方法,该异质外延单晶的生长方法是在单晶的基板上生长光栅常数与基板的光栅常数不同的单晶薄膜。为了减少薄膜中的光栅缺陷,使用该异质结太阳能电池的制造方法,异质外延单晶和异质结太阳能电池。解决方案:根据异质外延单晶的制造方法,通过在形成于基板10上的掩模层12中形成开口13之后,在开口13的底表面上形成基板10的暴露表面14,并且其晶格常数不同于晶格常数的硅单晶20。在暴露表面14的轮廓之后在暴露表面14上生长衬底10。使暴露表面14的宽度尺寸等于或小于衬底10中暴露表面14的宽度尺寸。硅晶体20的破坏强度变得等于与从基板10接收的伴随晶格应变的应力相等的情况。

著录项

  • 公开/公告号JP2014067869A

    专利类型

  • 公开/公告日2014-04-17

    原文格式PDF

  • 申请/专利权人 AKIYAMA NOBUYUKI;

    申请/专利号JP20120212300

  • 发明设计人 AKIYAMA NOBUYUKI;

    申请日2012-09-26

  • 分类号H01L21/205;C30B29/06;C30B25/04;C30B25/18;C23C16/24;C23C16/04;H01L31/04;

  • 国家 JP

  • 入库时间 2022-08-21 16:17:47

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