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X-ray diffractometer, data analysis method for X-ray diffractometer, control method for X-ray diffractometer, and program for realizing the method
X-ray diffractometer, data analysis method for X-ray diffractometer, control method for X-ray diffractometer, and program for realizing the method
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机译:X射线衍射仪,X射线衍射仪的数据分析方法,X射线衍射仪的控制方法以及用于实现该方法的程序
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摘要
PROBLEM TO BE SOLVED: To provide an X-ray diffraction device with which pole figure measurement is exactly performed even when a two-dimensional detector is used.SOLUTION: An X-ray diffraction device is equipped with: an X-ray source; a movable holding table which holds samples; a two-dimensional detector which detects X-rays to be emitted by diffraction from samples; and a control processing part which controls the X-ray source and the two-dimensional detector. The control processing part includes: storage means; arithmetic means (process (S50)); and pole figure creation means (process (S70)). The storage part stores a plurality of pieces of intensity data of X-rays detected under a plurality of conditions by the two-dimensional detector. The arithmetic means (process (S50)) performs a compensation operation to the intensity data so as to compensate difference in absorption amounts in samples of X-rays corresponding to the respective pieces of intensity data for the plurality of pieces of intensity data. The pole figure creation means (process (S70)) creates pole figure data on the samples using the plurality of pieces of intensity data after compensation to which the compensation operation is performed.
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