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MEASUREMENT DEVICE FOR CONCAVE SURFACE OPTICAL ELEMENT, MEASUREMENT DEVICE FOR CONCAVE SURFACE DIFFRACTION GRATING, AND MEASUREMENT DEVICE FOR FLAT SURFACE DIFFRACTION GRATING
MEASUREMENT DEVICE FOR CONCAVE SURFACE OPTICAL ELEMENT, MEASUREMENT DEVICE FOR CONCAVE SURFACE DIFFRACTION GRATING, AND MEASUREMENT DEVICE FOR FLAT SURFACE DIFFRACTION GRATING
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机译：凹面光学元件的测量装置，凹面衍射光栅的测量装置以及平坦表面衍射光栅的测量装置
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摘要
PROBLEM TO BE SOLVED: To provide a measurement device capable of quantitatively measuring a stray light value of a concave surface optical element in the same condition as a mounting state.;SOLUTION: A measurement device of a concave surface optical element 7 includes: a concave surface optical element; a rotation stage 6 that rotates the concave optical element; a laser device 1 that can change a distance to the rotation stage and is a light source irradiating the concave surface optical element with light; and a photodetector 8 that forms a predetermined angle with a line connecting the light source and the rotation stage, can change the distance to the rotation stage, and detects light reflected at a position other than a light focusing-point out of light reflected from the concave surface optical element.;COPYRIGHT: (C)2014,JPO&INPIT
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