首页>
外国专利>
ABNORMAL DUST GENERATION DETERMINATION METHOD, ABNORMAL DUST GENERATION DETERMINATION DEVICE AND POSITION OF ABNORMAL DUST GENERATION IDENTIFICATION SYSTEM
ABNORMAL DUST GENERATION DETERMINATION METHOD, ABNORMAL DUST GENERATION DETERMINATION DEVICE AND POSITION OF ABNORMAL DUST GENERATION IDENTIFICATION SYSTEM
展开▼
机译：异常扬尘的确定方法，异常扬尘的确定装置以及异常扬尘识别系统的位置
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide a method of determining abnormal dust generation capable of easily identifying a position of the abnormal dust generation.;SOLUTION: The abnormal dust generation determination method measures the number of particles of the particles having the particle size of a first size or larger as a first number of particles at a determination position at which the existence of dust is determined. Also, the abnormal dust generation determination method measures the number of particles of the particles having the particle size of a second size or larger as a second number of particles. The particle size distribution at the determination position is calculated based on a relation between the first size and the first number of particles and a relation between the second size and the second number of particles. Thus, the abnormal dust generation determination method determines whether the determination position is the position of dust generation based on the particle size distribution.;COPYRIGHT: (C)2014,JPO&INPIT
展开▼
