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METHOD FOR MANUFACTURING MASTER PLATE FOR MAKING MICROCONTACT PRINTING STAMP, MASTER PLATE FOR MAKING MICROCONTACT PRINTING STAMP, AND METHOD FOR MANUFACTURING MICROCONTACT PRINTING STAMP
METHOD FOR MANUFACTURING MASTER PLATE FOR MAKING MICROCONTACT PRINTING STAMP, MASTER PLATE FOR MAKING MICROCONTACT PRINTING STAMP, AND METHOD FOR MANUFACTURING MICROCONTACT PRINTING STAMP
PROBLEM TO BE SOLVED: To provide a method for manufacturing a master plate for making a micro-contact printing (μCP) stamp, by which a μCP stamp capable of uniform pattern printing in a large area can be manufactured through an easy process.;SOLUTION: A method for manufacturing a μCP stamp includes: a coating step in which a master plate for making a μCP stamp having a micro concavo-convex pattern formed on a surface thereof is used and PDMS (polydimethyl siloxane) is applied on the surface, where the micro concavo-convex pattern is formed, of the master plate for making a μCP stamp; an adhering step in which a support material is used and the support material is adhered to the PDMS film applied as described above; and a peeling step in which the PDMS film and the support material are peeled from the master plate for making a μCP stamp. The master plate for making a μCP stamp includes a substrate, a photosensitive resin layer comprising a photosensitive resin which is patterned on the substrate, and a light-shielding part formed on the substrate surface where the photosensitive resin layer is not formed.;COPYRIGHT: (C)2014,JPO&INPIT
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