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Arrangement for mounting an optical element such as extreme ultraviolet (EUV) projection exposure apparatus has damping element which brings about damping of natural vibration form of pin in a lateral direction
Arrangement for mounting an optical element such as extreme ultraviolet (EUV) projection exposure apparatus has damping element which brings about damping of natural vibration form of pin in a lateral direction
The mounting arrangement has actuator which exerts a controllable force on the optical element. The mechanical coupling in the form of a pin (110) is arranged between the actuator and optical element, relative to the drive axis of the actuator. The ratio of the stiffness of the mechanical coupling in an axial direction to the stiffness in a lateral direction is at least 100. The damping element (130) brings about the damping of the natural vibration form of the pin in a lateral direction. The pin has universal joints (120,121) the end sections for decoupling in a lateral direction.
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