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Acoustic resonator, as well as its production and selection process for a primary or base layer with crystallographic structure
Acoustic resonator, as well as its production and selection process for a primary or base layer with crystallographic structure
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机译：声谐振器及其具有晶体学结构的基层或基层的生产和选择工艺
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摘要
An acoustic resonator comprising: a substrate; at least one crystalline primary or base layer disposed on the substrate either directly or on one or more intermediate layers; a smooth and crystalline electrode layer disposed on the primary or base layer; and a piezoelectric layer disposed on the electrode layer, characterized in that (i) the primary or base layer or at least one of the primary or base layers has a crystallographic structure belonging to a first crystal system, (ii) the electrode layer is one crystallographic structure belonging to a second crystal system which is different from the first crystal system; and (iii) the atomic distance in the primary or base layer or in at least one of the primary or base layers or at least in the primary or base layer which is at the interface with the electrode and the atomic distance of the electrode in at least one direction within 15 percent are adjusted.
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