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METHOD FOR MANUFACTURING A SUSPENDED ZINC OXIDE NANOWIRE BASED-VOLATILE ORGANIC COMPOUND SENSOR WHICH IS FUNCTIONALIZATION-PROCESSED WITH PORPHYRIN AND THE VOLATILE ORGANIC COMPOUND SENSOR MANUFACTURED BY THE SAME
METHOD FOR MANUFACTURING A SUSPENDED ZINC OXIDE NANOWIRE BASED-VOLATILE ORGANIC COMPOUND SENSOR WHICH IS FUNCTIONALIZATION-PROCESSED WITH PORPHYRIN AND THE VOLATILE ORGANIC COMPOUND SENSOR MANUFACTURED BY THE SAME
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机译：制备以卟啉为功能的悬浮氧化锌纳米氧化物挥发性有机化合物的方法和由该方法制造的挥发性有机化合物
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摘要
PURPOSE: A method for manufacturing a suspended zinc oxide nanowire-based volatile organic compound sensor and the volatile organic compound sensor manufactured by the same are provided to minimize the size of the volatile organic compound sensor via a microprocessing process and to sense volatile organic compounds at high sensitivity.;CONSTITUTION: A method for manufacturing a suspended zinc oxide nanowire-based volatile organic compound sensor includes the following steps of: forming a pair of microelectrodes (30) on a substrate (10); forming a sensing unit with a zinc oxide nanowire (40) between the microelectrodes; and depositing porphyrin on the zinc oxide nanowire.;COPYRIGHT KIPO 2013
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