首页> 外国专利> MOIRE FRINGE MEASUREMENT SYSTEM USING AN INTERFEROMETER CAPABLE OF MINUTELY CHANGING THE AREA ON WHICH MOIRE FRINGE IS EMITTED BY MOVING A PRISM

MOIRE FRINGE MEASUREMENT SYSTEM USING AN INTERFEROMETER CAPABLE OF MINUTELY CHANGING THE AREA ON WHICH MOIRE FRINGE IS EMITTED BY MOVING A PRISM

机译:使用干涉仪可对光束进行干涉的莫尔条纹测量系统可通过移动棱镜发出莫尔条纹的区域

摘要

PURPOSE: A moire fringe measurement system using an interferometer is provided to generate moire fringe by using a laser as a light source and using a prism optimizing the reflectance of a laser light source, thereby generating the moire fringe with excellent contrast.;CONSTITUTION: A moire fringe measurement system using an interferometer includes a work stage (100), a first irradiation unit (200), a second irradiation unit (300), a sensing unit (400), and an image processing unit (500). A work piece (1) is seated on the upper portion of the work stage. The first irradiation unit is arranged on the upper portion of the work stage, and emits moire fringe on one surface of the work piece seated on the work piece. The second irradiation unit is arranged on the work stage, and emits straight line interference fringe on the other surface of the work piece seated on the work stage by arranged apart from the first irradiation unit. The sensing unit is arranged above the work stage and senses the deformed fringe emitted on the work piece. The image processing unit produces moire fringe by overlapping the reference straight line interference fringe which is sensed in a sensing unit and the deformed fringe which is sensed in the sensing unit. The straight line lattice fringe emitted by the first and second irradiation units is based on lasers (210,310) as a light source.;COPYRIGHT KIPO 2013;[Reference numerals] (500) Image processing unit
机译:目的:提供一种使用干涉仪的莫尔条纹测量系统,通过使用激光作为光源并使用棱镜优化激光光源的反射率来生成莫尔条纹,从而生成具有极佳对比度的莫尔条纹。使用干涉仪的莫尔条纹测量系统包括工作台(100),第一照射单元(200),第二照射单元(300),感测单元(400)和图像处理单元(500)。工件(1)位于工作台的上部。第一照射单元布置在工作台的上部,并且在安置在工件上的工件的一个表面上发射莫尔条纹。第二照射单元布置在工作台上,并且通过与第一照射单元分开布置,在位于工作台上的工件的另一表面上发射直线干涉条纹。感测单元布置在工作台上方,并且感测发射到工件上的变形条纹。图像处理单元通过重叠在感测单元中感测的基准直线干涉条纹和在感测单元中感测的变形条纹来产生莫尔条纹。第一和第二照射单元发出的直线晶格条纹基于激光(210,310)作为光源。; COPYRIGHT KIPO 2013; [参考数字](500)图像处理单元

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