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DEVICE OF DIVIDING AND SUPPLYING GAS AND A METHOD OF DIVIDING AND SUPPLYING GAS USING THE SAME, CAPABLE OF PRECISELY DIVIDING AND SUPPLYING GAS
DEVICE OF DIVIDING AND SUPPLYING GAS AND A METHOD OF DIVIDING AND SUPPLYING GAS USING THE SAME, CAPABLE OF PRECISELY DIVIDING AND SUPPLYING GAS
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机译:能够进行气体的分割供给的装置以及使用该气体的能够进行气体的分割供给的方法
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摘要
PURPOSE: A device of dividing and supplying gas and a method of dividing and supplying gas using the same improve the quality by completely preventing the overshooting of gas.;CONSTITUTION: Multiple divided passages (L1-L4) divide and supply gas from a pressure type flow control device (4) to a process chamber (15). Thermal flow sensors (6a-6d) are installed in the divided passages, respectively. Electric valves (7a-7d) are installed on the downstream side of the thermal flow sensor. Switching type controllers (16a-16d) control the opening and closing of the electric valves, respectively. The switching type controllers is switched by valve opening control for maintaining the electronic valves at a predetermined constant valve opening degree based on a valve opening control command signal (Sp) and divided flow control for controlling the opening degree of the electric valves by feedback control based on a flow detection signal of the thermal flow sensor by a divided flow control command signal (Ss).;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Sp or Ss
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