首页> 外国专利> DEVICE OF DIVIDING AND SUPPLYING GAS AND A METHOD OF DIVIDING AND SUPPLYING GAS USING THE SAME, CAPABLE OF PRECISELY DIVIDING AND SUPPLYING GAS

DEVICE OF DIVIDING AND SUPPLYING GAS AND A METHOD OF DIVIDING AND SUPPLYING GAS USING THE SAME, CAPABLE OF PRECISELY DIVIDING AND SUPPLYING GAS

机译:能够进行气体的分割供给的装置以及使用该气体的能够进行气体的分割供给的方法

摘要

PURPOSE: A device of dividing and supplying gas and a method of dividing and supplying gas using the same improve the quality by completely preventing the overshooting of gas.;CONSTITUTION: Multiple divided passages (L1-L4) divide and supply gas from a pressure type flow control device (4) to a process chamber (15). Thermal flow sensors (6a-6d) are installed in the divided passages, respectively. Electric valves (7a-7d) are installed on the downstream side of the thermal flow sensor. Switching type controllers (16a-16d) control the opening and closing of the electric valves, respectively. The switching type controllers is switched by valve opening control for maintaining the electronic valves at a predetermined constant valve opening degree based on a valve opening control command signal (Sp) and divided flow control for controlling the opening degree of the electric valves by feedback control based on a flow detection signal of the thermal flow sensor by a divided flow control command signal (Ss).;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Sp or Ss
机译:目的:一种分配和供气的装置以及一种使用该装置的供气和供气的方法,可以通过完全防止气体​​过冲来提高质量。;构成:多个分流通道(L1-L4)从一种压力类型分配和供气流量控制装置(4)进入处理室(15)。热流传感器(6a-6d)分别安装在分隔的通道中。电动阀(7a-7d)安装在热流量传感器的下游。开关式控制器(16a-16d)分别控制电动阀的打开和关闭。通过基于阀打开控制命令信号(Sp)的用于将电子阀保持在预定恒定阀打开度的阀打开控制和用于基于反馈控制来控制电动阀的开度的分流控制来切换开关型控制器。 COPYRIGHT KIPO 2013; [参考数字](AA)Sp或Ss对热流量传感器的流量检测信号进行分流控制

著录项

  • 公开/公告号KR20130099838A

    专利类型

  • 公开/公告日2013-09-06

    原文格式PDF

  • 申请/专利权人 FUJIKIN INC.;

    申请/专利号KR20130017918

  • 申请日2013-02-20

  • 分类号G05D7/06;G05D11/13;F16K31/06;

  • 国家 KR

  • 入库时间 2022-08-21 16:26:21

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