PURPOSE: A vacuum detection method of cryo pump controller, cryo pump system, and cryo pump is provided to moderately detect vacuum state by controlling exhaustion of a cryo pump.;CONSTITUTION: A cryo-pump control device(80) comprises a cryo panel(48), a pump container(36), a pressure controller(94), a visual control part(88), and a vacuum-maintaining detection part(92). The cryo panel condenses and absorbs gas by cooling gas. The pump container accepts the cryo panel. The vacuum pump stops vacuum pumping. The visual control part sets a first measuring time and second measuring time. The vacuum maintaining judging part judges pressure difference between pressures at the first measuring time and at the second measuring time is within a permissible range.;COPYRIGHT KIPO 2013;[Reference numerals] (34) Compressor; (60) Purge gas feeding apparatus; (70) Roughing pump; (80) Cryo-pump control device; (82) Temperature-increasing treatment controller; (84) Purge treatment controller; (86) Exhaust treatment controller; (88) Time management part; (90) Vacuum-reaching time judging part; (92) Vacuum degree maintaining judging part; (94) Pressure controller
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