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3D integrated circuit device having lower-cost active circuitry layers stacked before higher-cost active circuitry layer

机译:具有在较高成本的有源电路层之前堆叠的较低成本的有源电路层的3D集成电路器件

摘要

A 3D integrated circuit structure is provided. The 3D integrated circuit structure includes an interface wafer including a first wiring layer, a first active circuitry layer including active circuitry, and a wafer including active circuitry. The first active circuitry layer is bonded face down to the interface wafer, and the wafer is bonded face down to the first active circuitry layer. The first active circuitry layer is lower-cost than the wafer.
机译:提供了一种3D集成电路结构。该3D集成电路结构包括:接口晶片,其包括第一布线层;第一有源电路层,其包括有源电路;以及晶片,其包括有源电路。将第一有源电路层面朝下结合至界面晶片,并且将晶片面向下面结合至第一有源电路层。第一有源电路层的成本低于晶片。

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