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Rational approximation and continued-fraction approximation approaches for computation efficiency of diffraction signals

机译:衍射信号计算效率的有理逼近和连续分数逼近方法

摘要

Methods and apparatuses for improving computation efficiency for diffraction signals in optical metrology are described. The method includes simulating a set of diffraction orders for a structure. A set of diffraction efficiencies is determined for the set of diffraction orders. A rational approximation or a continued-fraction approximation is applied to the set of diffraction efficiencies to obtain a rationally approximated set of diffraction efficiencies or a continued-fraction approximated set of diffraction efficiencies, respectively. A simulated spectrum is then provided.
机译:描述了用于提高光学计量学中的衍射信号的计算效率的方法和设备。该方法包括模拟结构的一组衍射级。为一组衍射级确定一组衍射效率。将有理近似或连续分数近似应用于衍射效率集合,以分别获得合理近似的衍射效率集合或连续分数近似的衍射效率集合。然后提供了模拟光谱。

著录项

  • 公开/公告号US8560270B2

    专利类型

  • 公开/公告日2013-10-15

    原文格式PDF

  • 申请/专利权人 HANYOU CHU;

    申请/专利号US20080331192

  • 发明设计人 HANYOU CHU;

    申请日2008-12-09

  • 分类号G06F3/01;G06F3/00;G06F3/06;G06F13/10;

  • 国家 US

  • 入库时间 2022-08-21 16:47:07

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