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CMOS Image Sensor Big Via Bonding Pad Application for AICu Process

机译:CMOS图像传感器大通孔焊盘在AICu工艺中的应用

摘要

An integrated circuit includes a substrate having a bonding pad region and a non-bonding pad region. A relatively large via, called a “big via,” is formed on the substrate in the bonding region. The big via has a first dimension in a top view toward the substrate. The integrated circuit also includes a plurality of vias formed on the substrate in the non-bonding region. The plurality of vias each have a second dimension in the top view, the second dimension being substantially less than the first dimension.
机译:集成电路包括具有键合焊盘区域和非键合焊盘区域的基板。在接合区域中的基板上形成相对较大的通孔,称为“大通孔”。大通孔在俯视图中具有朝向衬底的第一尺寸。集成电路还包括形成在非结合区域中的基板上的多个通孔。多个通孔在俯视图中均具有第二尺寸,第二尺寸实质上小于第一尺寸。

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