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ELECTROSTATIC CHUCK, THIN FILM DEPOSITION APPARATUS INCLUDING THE ELECTROSTATIC CHUCK, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS BY USING THE THIN FILM DEPOSITION APPARATUS
ELECTROSTATIC CHUCK, THIN FILM DEPOSITION APPARATUS INCLUDING THE ELECTROSTATIC CHUCK, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS BY USING THE THIN FILM DEPOSITION APPARATUS
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机译：静电吸盘，包括静电吸盘的薄膜沉积设备以及通过使用薄膜沉积设备制造有机发光显示设备的方法
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摘要
An electrostatic chuck, a thin film deposition apparatus including the electrostatic chuck, and a method of manufacturing an organic light emitting display apparatus using the thin film deposition apparatus. The electrostatic chuck includes: a first plate; a first common wire disposed on the first plate and electrically connected to a plus terminal of an electric power source; first electrode patterns electrically connected to the first common wire, separated by a distance from each other, and extending from the first common wire; a second common wire disposed on the first plate and electrically connected to a minus terminal of the electric power source; second electrode patterns electrically connected to the second common wire, separated by a distance from each other, and extending from the second common wire; a first additional wire electrically connected to the first common wire; and a second additional wire electrically connected to the second common wire.
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