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The wire electrical discharge machining device, wire electrical discharge machining manner, sheet production manner and semiconductor wafer production manner
The wire electrical discharge machining device, wire electrical discharge machining manner, sheet production manner and semiconductor wafer production manner
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机译:线材放电加工装置,线材放电加工方式,片材生产方式和半导体晶片生产方式
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摘要
A wire electric discharge machining apparatus is constructed in such a manner as to include: a wire electrode having a plurality of cutting wire portions that are separated from one another in parallel and are opposed to a workpiece; a machining power supply that generates a pulsed machining voltage; a plurality of power feed contact units that are electrically connected to the cutting wire portions and apply the machining voltage between the cutting wire portions and the workpiece; and a nozzle that ejects machining liquid from an ejection opening toward an electrode gap along the cutting wire portions.
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