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Hafnium-based compounds, hafnium-based thin film forming material, and hafnium-based thin film forming method
Hafnium-based compounds, hafnium-based thin film forming material, and hafnium-based thin film forming method
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机译：类化合物，ha类薄膜形成材料以及ha类薄膜形成方法
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摘要
Rich in stability and are liquid at room temperature, and can perform a stable supply of raw materials, and to provide a technique capable of stably forming a hafnium-based high-quality thin film. Hafnium-based thin-film forming material is a compound represented by the following general formula [I]. The general formula [I] LHf (NR 1 R 2) 3 (However, L, is an alkyl group, 1, R 2 substituted cyclopentadienyl group or cyclopentadienyl group, R can be the same different from each other and R 2 R 1. )
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机译：具有丰富的稳定性并且在室温下为液体，并且可以执行稳定的原材料供应，并且提供一种能够稳定地形成ha基高质量薄膜的技术。 based系薄膜形成材料是下述通式[I]表示的化合物。通式[I] LHf （NR 1 R 2）3 （但是，L是烷基基团 1，R 2 取代的环戊二烯基或环戊二烯基，R可以彼此相同，R 2 R 1。）
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