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Method for melting fine particles composed of the induction heating coil and a semiconductor material
Method for melting fine particles composed of the induction heating coil and a semiconductor material
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机译：由感应加热线圈和半导体材料构成的微粒的熔融方法
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摘要
PROBLEM TO BE SOLVED: To provide an induction heating coil for melting granules as raw materials and for maintaining the molten state in the production of a single crystal of silicon or the like.;SOLUTION: The induction heating coil for melting granules 13 composed of semiconductor material on a plate 9 with an outlet tube 11 has a coil body 1 provided with current-guiding slots. The coil body has a passage opening 6 for granules in a region that lies outside the center of the coil body 1 and current-carrying segments 2 which projects from the center of the lower side of the coil body 1 and which are electrically conductively connected by a web 3 at a lower end. The induction heating coil for melting granules inductively heat a film 12 of molten semiconductor material and a melt with a free surface which is surrounded by the film 12 and keeps them liquid, so as to ensure a continuous and controllable melt flow from the plate 9 to the single crystal 10.;COPYRIGHT: (C)2009,JPO&INPIT
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