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MEASUREMENT ACCURACY IMPROVEMENT METHOD FOR STYLUS TYPE STEP PROFILER FOR SURFACE SHAPE MEASUREMENT AND STYLUS TYPE STEP PROFILER FOR SURFACE SHAPE MEASUREMENT IN WHICH THE METHOD IS APPLIED
MEASUREMENT ACCURACY IMPROVEMENT METHOD FOR STYLUS TYPE STEP PROFILER FOR SURFACE SHAPE MEASUREMENT AND STYLUS TYPE STEP PROFILER FOR SURFACE SHAPE MEASUREMENT IN WHICH THE METHOD IS APPLIED
PROBLEM TO BE SOLVED: To provide a method to improve sensibility and displacement resolution of a stylus type profiler composed of a probe balancing on a supporting point and a displacement sensor, and a stylus type profiler for surface shape measurement.;SOLUTION: On the basis of an equation of motion of a tip of the probe, F=I/r2d2z/dt2, which holds when F is a force applied to the probe, I is a moment of inertia around the supporting point, r is a distance between the supporting point and the probe, z is a displacement of the tip of the probe and t is a time, the distance r between the supporting point and the probe is determined according to the force applied to the probe and a line connecting the supporting point and the probe tip is inclined from a horizontal line by 45 degrees so as to lower the probe tip.;COPYRIGHT: (C)2013,JPO&INPIT
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机译：要解决的问题：提供一种提高触针型轮廓仪的灵敏度和位移分辨率的方法，该探针由在支撑点上平衡的探针和位移传感器以及用于表面形状测量的触针型轮廓仪组成;解决方案：在此基础上探头尖端的运动方程F = I / r 2 d 2 z / dt 2 是施加到探针的力，I是围绕支撑点的惯性矩，r是支撑点与探针之间的距离，z是探针尖端的位移，t是时间，距离r支撑点和探头之间的距离是根据施加到探头的力确定的，连接支撑点和探头尖端的线从水平线倾斜45度以降低探头尖端。;版权所有：（C ）2013年，日本特许厅＆INPIT
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