PROBLEM TO BE SOLVED: To provide a simple and inexpensive method for forming a strong film capable of efficiently controlling the thickness and refractive index of a coating material as well as a substrate material to be coated and its shape.;SOLUTION: The method for forming a silica or silica-like film coated on a substrate includes: preparing a precursor formulation by adding to a solvent, a hydrolyzable silicate oligomer represented by structural formula in the figure (wherein, each X is independently selected from the hydrolyzable and non-hydrolyzable groups, provided that at least three Xs must be hydrolyzable groups); forming a coated material of the precursor formulation on the substrate; and hardening the coated material by hydrolyzing and condensing the coated material in a gaseous atmosphere including a base, vapor and a retarder for retarding hydrolysis of the hydrolyzable silicate oligomer.;COPYRIGHT: (C)2013,JPO&INPIT
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