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The vibrating gyro and its production methodological null annular condition or the vibrating
The vibrating gyro and its production methodological null annular condition or the vibrating
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机译:振动陀螺及其生产方法的零环条件或振动
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摘要
As for the vibrating gyro of this invention, the vibrating gyro 100 which has piezoelectric body membrane 40, as as annular condition or vibrating body 11 of multilateral form and vibrating body 11 softly is supported the leg is formed on 15 which possesses the fixed end and vibrating body 11, as the plural electrodes 13b which put piezoelectric body membrane 40 to thickness direction with higher stratum of society metal membrane 60 and lower stratum metal membrane 30 and, it is formed on leg 15, with higher stratum of society metal membrane 60 and lower stratum metal membrane 30 piezoelectric body membrane 40 and low the drawer which puts insulator film 50 of permittivity to thickness directionIt has with electrode 14.
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