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TAPPING MODE AFM INCLUDING MULTIPLE CANTILEVER FOR AFM AND SCAN METHOD OF THE SAME
TAPPING MODE AFM INCLUDING MULTIPLE CANTILEVER FOR AFM AND SCAN METHOD OF THE SAME
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机译：包含多个悬臂的攻丝模式原子力显微镜和相同的扫描方法
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摘要
PROBLEM TO BE SOLVED: To provide: a cantilever that can control impact energy in a collision and reduce damage to a sample to solve the problem in which in a tapping mode of an atomic force microscope the cantilever comes into contact with the measurement sample even in a very short time and damages a surface of the sample; and a scan device using the cantilever.;SOLUTION: A multiple cantilever is a many-body vibration system formed by connecting one cantilever 8A with other two cantilevers 8B and 8C. An AFM device is fabricated so as to scan a surface of the sample while tapping the cantilever 8B and apply an excitation to the cantilever 8C. Since a certain amount of energy flows from the cantilever 8C to the cantilever 8B, when an input amount of energy by excitation and an attenuation of energy by collision in tapping are controlled to be equal to the energy transfer amount, a steady vibration is expected to occur thereby controlling the collision speed of the cantilever 8B and reducing the impact energy.;COPYRIGHT: (C)2013,JPO&INPIT
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