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首页> 外国专利> Micro-actuator for use in rapid evaluation of e.g. pharmaceutical products in microphone-fluidic applications, has electrodes, where micro-actuator is activated by electric voltage applied between electrodes to deform deformable membrane

Micro-actuator for use in rapid evaluation of e.g. pharmaceutical products in microphone-fluidic applications, has electrodes, where micro-actuator is activated by electric voltage applied between electrodes to deform deformable membrane

机译：微致动器，用于快速评估例如麦克风流体应用中的药品具有电极，微致动器通过电极之间施加的电压激活，从而使可变形膜变形

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摘要

The micro-actuator has a set of electrodes (1, 2) separated by a deformable membrane (3), where the micro-actuator is activated by electric voltage applied between the electrodes to deform the deformable membrane. A silicon substrate (4) forms a support on which the electrodes rest. The membrane includes a mixture of polymer and nano-object conductor or semi-conductor material, where thickness of the membrane ranges between one and hundred micrometer. The nano-objects are nano-wires having diameter ranging between zero and hundred nanometers. The nano-objects are made of material chosen among silicon carbide, carbon black, carbon nanotubes, iron, copper, silver, nickel, aluminum, conducting polymer such as copper polyphtalocyanine or polynaniline, and oxide such as silicon oxide, zinc oxide, barium titanate or titanium oxide, or a silicate. An independent claim is also included for a method for fabricating a micro-actuator.
机译：微致动器具有由可变形膜（3）隔开的一组电极（1、2），其中微致动器被施加在电极之间的电压激活以使可变形膜变形。硅基板（4）形成支撑物，电极放置在支撑物上。膜包括聚合物和纳米物体导体或半导体材料的混合物，其中膜的厚度在一百和一百微米之间。纳米物体是直径在零和一百纳米之间的纳米线。纳米物体由选自以下的材料制成：碳化硅，炭黑，碳纳米管，铁，铜，银，镍，铝，导电聚合物（例如多酞菁铜或聚苯胺铜）和氧化物（例如氧化硅，氧化锌，钛酸钡）或氧化钛或硅酸盐。还包括用于制造微致动器的方法的独立权利要求。

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