首页> 外国专利> RELIABILITY IMPROVING DEVICE AND A METHOD BETWEEN A SHEET-TYPE STRUCTURE NANO THIN FILM AND A SUBSTRATE CAPABLE OF IMPROVING ELECTRICAL, MECHANICAL, AND OPTICAL PROPERTIES OF THE NANO THIN FILMS

RELIABILITY IMPROVING DEVICE AND A METHOD BETWEEN A SHEET-TYPE STRUCTURE NANO THIN FILM AND A SUBSTRATE CAPABLE OF IMPROVING ELECTRICAL, MECHANICAL, AND OPTICAL PROPERTIES OF THE NANO THIN FILMS

机译:片状结构纳米薄膜与可改善纳米薄膜的电,机械和光学性能的基质之间的可靠性改进装置和方法

摘要

PURPOSE: A reliability improving device and a method between a sheet-type structure nano thin film and a substrate are provided to uniformly weld the nano thin film to a substrate by compressing the nano thin film with a roller or a slider.;CONSTITUTION: A reliability improving device(1000) between a nano thin film and a substrate comprises a transfer tool, an upper roller and a lower roller. The transfer tool transfers a substrate(110) in which a nano thin film(120) is formed on the upper side to the X-axis. The upper roller and the lower roller are respectively isolated towards the upper and the lower sides having constant distance. The upper roller and the lower roller can move towards the Z-axis and enables load control. More than 2 layered coating layers are formed on the outer circumference of the upper roller. A reliability enhancing method between the nano thin film and the substrate comprises the following steps: providing a substrate in which the nano thin film is formed on the upper side; compressing the nano thin film by transferring the upper roller and the lower roller towards the Z-axis; and compressing the nano thin film on the substrate by relative motion of the substrate, the upper roller and the lower roller.;COPYRIGHT KIPO 2012
机译:目的:提供一种片状结构纳米薄膜和基板之间的可靠性提高装置和方法,以通过用辊或滑块压缩纳米薄膜将纳米薄膜均匀地焊接到基板上。纳米薄膜和基板之间的可靠性提高装置(1000)包括转移工具,上辊和下辊。转移工具将在其上侧形成有纳米薄膜(120)的基板(110)转移到X轴。上辊和下辊分别朝向具有恒定距离的上侧和下侧隔离。上辊和下辊可以朝Z轴移动并可以控制负载。在上辊的外周上形成两个以上的层状涂层。纳米薄膜与基板之间的可靠性增强方法包括以下步骤:提供其中在上侧形成有纳米薄膜的基板;通过将上辊和下辊移向Z轴来压缩纳米薄膜;并通过基底,上辊和下辊的相对运动压缩基底上的纳米薄膜。; COPYRIGHT KIPO 2012

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