首页>
外国专利>
Zinc-tin composite transparent conductive oxide films and Preparation method of zinc-tin composite transparent conductive oxide films by using electron cyclotron resonance plasma Chemical Vapor Deposition and Transparent Heat Generator Thereof
Zinc-tin composite transparent conductive oxide films and Preparation method of zinc-tin composite transparent conductive oxide films by using electron cyclotron resonance plasma Chemical Vapor Deposition and Transparent Heat Generator Thereof
展开▼
机译：锌锡复合透明导电氧化物膜及其电子回旋共振等离子体化学气相沉积及其透明发热体的制备方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention in an e- Tron 0 people Sykes (Electro Cyclotron Resonance, ECR) by the organic chemical vapor deposition , optical transmittance is excellent , the adhesion and conductivity of the interface and excellent transparent conductive zinc tin oxide thin film composite Zn x Sn y O method of z relates to . ; in a stable zinc tin composite oxide thin film by the production process according to the present invention can be obtained in the physical vapor deposition ZnSnO 3 , Zn 2 SnO 4 than the chemical vapor deposition by electron cyclotron Sykes can be far superior electrical conductivity synthesis of a compound of zinc tin oxide composite thin film , widely applied in various electrical products, including elements of the transparent heating elements is expected to be .
展开▼
机译：本发明在e-Tron 0人赛克斯（Electro Cyclotron Resonance，ECR）中通过有机化学气相沉积，具有优异的透光率，界面的粘附性和导电性以及优异的透明导电性锌锡氧化物薄膜复合Zn 的> x Sn y O 方法与。 ;在本发明的稳定的锌锡复合氧化物薄膜中，通过本发明的制备方法可以在物理气相沉积中获得ZnSnO 3 ，Zn 2 SnO 4 比通过电子回旋加速器Sykes进行的化学气相沉积可以优越的电导率合成出一种氧化锌锡复合化合物的薄膜，广泛应用于各种电气产品，包括透明加热元件有望。
展开▼
