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EQUIPMENT FOR FABRICATING DETAIL PATTERN METHOD FOR FABRICATING DETAIL PATTERN BY USING THE SAME
EQUIPMENT FOR FABRICATING DETAIL PATTERN METHOD FOR FABRICATING DETAIL PATTERN BY USING THE SAME
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机译：制造细节图案的设备通过使用相同的制造细节图案的方法
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摘要
A fine pattern forming apparatus and a fine pattern forming method using the same are provided to simplify forming processes and to reduce fabrication costs by performing sequentially predetermined processes using one chamber alone. A fine pattern forming apparatus includes a first stage, a second stage, an upper holder, a Z axis driving unit, an aligner, and an UV(UltraViolet) lamp. The first stage(22) is used as an electrostatic chuck capable of loading a soft mold, wherein the soft mold is attached to a back plane of a chamber. The second stage(24) is used for loading a substrate. The upper holder(25) is used for fixing the first stage. The Z axis driving unit(26) is used for driving the second stage in a Z axis direction. The aligner is arranged on an upper surface of the chamber. The UV lamp(31) is installed at one side of the chamber.
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