首页> 外国专利> APPARATUS FOR REFORMING THE PHYSICAL PROPERTIES OF A CONDUCTIVE POLYMER NANOSTRUCTURE USING FOCUSED ELECTRON BEAM, AND A METHOD FOR THE SAME, AND A SERIAL JUNCTION NANOWIRE REFORMED BY THE METHOD

APPARATUS FOR REFORMING THE PHYSICAL PROPERTIES OF A CONDUCTIVE POLYMER NANOSTRUCTURE USING FOCUSED ELECTRON BEAM, AND A METHOD FOR THE SAME, AND A SERIAL JUNCTION NANOWIRE REFORMED BY THE METHOD

机译:用聚焦电子束改变导电聚合物纳米结构的物理性能的装置,方法,以及通过该方法改变的串联结纳米结构

摘要

PURPOSE: An apparatus for reforming the physical properties of a conductive polymer nanostructure, and a method for the same, and a serial junction nanowire reformed by the method are provided to reform the structural characteristic, the doped state, and the electric characteristic of the nanostructure by precisely controlling electron beam.;CONSTITUTION: An apparatus for reforming the physical properties of a conductive polymer nanostructure includes a conductive polymer nanostructure(180), a focused electron beam emitting part(100), and a focused electron beam controlling part(190). The focused electron beam emitting part emits nanoscaled-electron beam in order to generate a focus on the conductive polymer nanostructure. The focused electron beam controlling part controls the emitted position of the nanoscaled-electron beam. The conductive polymer nanostructure is a nanowire. The focused electron beam emitting part is one of a scanning electron microscope, a transmission electron microscope, and an electron beam lithography device.;COPYRIGHT KIPO 2013;[Reference numerals] (190) Focused electron beam controlling part; (AA) Electron beam source; (BB) First light collecting lens; (CC) Aperture; (DD) Stigmator/deflection coil; (EE) Second light collecting lens
机译:目的:提供一种用于重整导电聚合物纳米结构的物理性质的设备及其方法,以及通过该方法重整的串联结纳米线,以重整纳米结构的结构特性,掺杂状态和电特性。组成:一种用于重整导电聚合物纳米结构物理性能的装置,包括导电聚合物纳米结构(180),聚焦电子束发射部件(100)和聚焦电子束控制部件(190)。 。聚焦电子束发射部分发射纳米级电子束,以便在导电聚合物纳米结构上产生焦点。聚焦电子束控制部分控制纳米级电子束的发射位置。导电聚合物纳米结构是纳米线。聚焦电子束发射部件是扫描电子显微镜,透射电子显微镜和电子束光刻设备之一。; COPYRIGHT KIPO 2013; [附图标记](190)聚焦电子束控制部件; (AA)电子束源; (BB)第一聚光透镜; (CC)光圈; (DD)柱头/偏转线圈; (EE)第二聚光镜

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