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APPARATUS FOR REFORMING THE PHYSICAL PROPERTIES OF A CONDUCTIVE POLYMER NANOSTRUCTURE USING FOCUSED ELECTRON BEAM, AND A METHOD FOR THE SAME, AND A SERIAL JUNCTION NANOWIRE REFORMED BY THE METHOD
APPARATUS FOR REFORMING THE PHYSICAL PROPERTIES OF A CONDUCTIVE POLYMER NANOSTRUCTURE USING FOCUSED ELECTRON BEAM, AND A METHOD FOR THE SAME, AND A SERIAL JUNCTION NANOWIRE REFORMED BY THE METHOD
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机译:用聚焦电子束改变导电聚合物纳米结构的物理性能的装置,方法,以及通过该方法改变的串联结纳米结构
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PURPOSE: An apparatus for reforming the physical properties of a conductive polymer nanostructure, and a method for the same, and a serial junction nanowire reformed by the method are provided to reform the structural characteristic, the doped state, and the electric characteristic of the nanostructure by precisely controlling electron beam.;CONSTITUTION: An apparatus for reforming the physical properties of a conductive polymer nanostructure includes a conductive polymer nanostructure(180), a focused electron beam emitting part(100), and a focused electron beam controlling part(190). The focused electron beam emitting part emits nanoscaled-electron beam in order to generate a focus on the conductive polymer nanostructure. The focused electron beam controlling part controls the emitted position of the nanoscaled-electron beam. The conductive polymer nanostructure is a nanowire. The focused electron beam emitting part is one of a scanning electron microscope, a transmission electron microscope, and an electron beam lithography device.;COPYRIGHT KIPO 2013;[Reference numerals] (190) Focused electron beam controlling part; (AA) Electron beam source; (BB) First light collecting lens; (CC) Aperture; (DD) Stigmator/deflection coil; (EE) Second light collecting lens
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