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METHOD, DEVICE FOR TEXTURING THIN-FILM SOLAR CELL USING DROPLET AND THIN-FILM SOLAR CELL TEXTURED BY THE SAME

机译:利用液滴构造薄膜太阳能电池并构造薄膜太阳能电池的方法,装置

摘要

The droplets thin film solar cell using texturing methods, texturing device, and whereby the thin film solar cell is provided. A thin film solar cell texturing method using a liquid drop according to the invention to form small liquid texturing solution; The thin film is placed in a solar cell is inside, the method comprising: injecting a plasma is less texturing solution mixture formed in the plasma reactor; And characterized in that it comprises the step of texturing the thin-film solar cells, texturing process according to the invention, the device unlike conventional texturing process which proceeds in multiple stages in a separate chamber, all the texturing process in one chamber in progress do. Therefore, it compared with the prior art, which has excellent economical efficiency and process, using a wet etch, since the use of the plasma reactor by the process control easier, and more environmentally friendly has advantages. ;
机译:使用纹理化方法的液滴薄膜太阳能电池,纹理化装置,由此提供薄膜太阳能电池。根据本发明的使用液滴的薄膜太阳能电池纹理化方法以形成小的液体纹理化溶液;将该薄膜置于内部的太阳能电池中,该方法包括:注入等离子较少纹理化溶液的混合物形成在等离子反应器中;并且其特征在于,其包括使薄膜太阳能电池纹理化的步骤,根据本发明的纹理化工艺,与传统的纹理化工艺不同的装置,该设备在单独的腔室中分多个阶段进行,所有纹理化处理都在一个腔室中进行。因此,与通过湿法蚀刻而具有优异的经济效率和工艺的现有技术相比,由于通过工艺控制更容易使用等离子体反应器,并且对环境更加友好,因此具有优点。 ;

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