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METHOD FOR MEASURING THE 3D MOVEMENT OF MICRO AND NANO SCALES USING HYBRID MICRO/NANO PIV SYSTEM, CAPABLE OF MEASURING THE 3D MOVEMENT OF A MICRO FLUIDIC ELEMENT IN MICRO SCALE AND NANO MULTI SCALE AT THE SAME TIME
METHOD FOR MEASURING THE 3D MOVEMENT OF MICRO AND NANO SCALES USING HYBRID MICRO/NANO PIV SYSTEM, CAPABLE OF MEASURING THE 3D MOVEMENT OF A MICRO FLUIDIC ELEMENT IN MICRO SCALE AND NANO MULTI SCALE AT THE SAME TIME
PURPOSE: A method for measuring the 3D movement of micro and nano scales using hybrid micro/nano PIV system is provided to measure the 3D movement as means for studying a mass transfer by accurately calculating the 3D movement of a micro fluidic element because a target manufactured by an etching process is used for the calibration.;CONSTITUTION: A method for measuring the 3D movement of micro and nano scales using hybrid micro/nano PIV system is as follows. A defocusing PIV device and a total reflection fluorescent microscope are calibrated. The 3D movement of a micro fluidic element is measured with the defocusing PIV device in micro scale and with the total reflection fluorescent microscope in nano scale.;COPYRIGHT KIPO 2012
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