PURPOSE: A deflection preventing suseptor is provided to prevent deflection to be generated by stress difference of a bottom surface and an upper side by identically forming the surface area of the bottom surface and the upper side of a body of graphite material. CONSTITUTION: A pocket(20) is formed on the upper side of a body(10). A substrate is accepted in the pocket. An illumination control surface(40) is formed by processing a bottom surface of the body. A ceramic coating layer(30) is coated on the front surface of the body equipped with the pocket and the illumination control surface to constant thickness. A dummy pocket is formed on the bottom surface of the body.
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