首页>
外国专利>
ZINC OXIDE NANOROD, A MANUFACTURING METHOD AND APPARATUS OF ZINC OXIDE NANOROD USING A METAL TRANSPORT DEPOSITION, A MANUFACTURING METHOD OF ELECTRO-LUMINESCENT DISPLAY NANOROD USING THE ZINC OXIDE NANOROD CAPABLE OF DIVERSIFYING A GROWTH SUBSTRATE
ZINC OXIDE NANOROD, A MANUFACTURING METHOD AND APPARATUS OF ZINC OXIDE NANOROD USING A METAL TRANSPORT DEPOSITION, A MANUFACTURING METHOD OF ELECTRO-LUMINESCENT DISPLAY NANOROD USING THE ZINC OXIDE NANOROD CAPABLE OF DIVERSIFYING A GROWTH SUBSTRATE
PURPOSE: A zinc oxide nanorod, a manufacturing method and apparatus of zinc oxide nanorod using a metal, a manufacturing method of electro-luminescent display nanorod using the zinc oxide nanorod are provided to vaporize nanorod and nanowire having uniform length by growing the zinc oxide nanorod and the nanowire on the substrate at relatively low temperature.;CONSTITUTION: A zinc oxide nanorod, a manufacturing apparatus of zinc oxide nanorod comprises a lateral furnace(101), a heater(110), carrier gas feeding parts(132,133) and an oxygen implanting part(131). A manufacturing method of the zinc oxide nanorods using transport deposition comprises the following steps: placing zinc metal in area-source within the furnace and placing growth substrates(121) in the growth region within the furnace; making the zinc metal into powder by heating inside the furnace and vaporizing the zinc metal; moving the powder state zinc metal to the growth region by using carrier gas provided to the furnace; and reacting oxygen gas which is directly inserted in the growth region with the molecular state zinc metal on the growth substrate.;COPYRIGHT KIPO 2012
展开▼
