首页>
外国专利>
ADHESIVE CHUCK, A SUBSTRATE BONDING DEVICE USING ATTRACTION BETWEEN MOLECULES, AND A METHOD THEREOF
ADHESIVE CHUCK, A SUBSTRATE BONDING DEVICE USING ATTRACTION BETWEEN MOLECULES, AND A METHOD THEREOF
展开▼
机译：吸附卡盘，利用分子间吸引力的基质结合装置及其方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: An adhesive chuck, a substrate bonding device using the same, and a method thereof are provided to bone a substrate by van der Waals force.;CONSTITUTION: An adhesive chuck(120) is located in a chamber. The adhesive chuck includes a plurality of adhesive protrusions(124a). The adhesive protrusions are bonded each other by attraction between a substrate and molecules. A driving unit makes the substrate close to another substrate which is located in the chamber to bond the substrates each other. A plurality of separation pins penetrate the adhesive chuck to separate the substrates. A separation member is coupled with ends of the separation pins. The separation member includes a separation bar. The separation bar pressurizes the substrate in a separation direction when the substrates are separated.;COPYRIGHT KIPO 2012
展开▼
