首页> 外国专利> PHENOL COMPOUND CAPABLE OF PROMOTING DEVELOPMENT DUE TO ALKALINE DEVELOPER, AND A POSITIVE TYPE PHOTOSENSITIVE COMPOSITION WITH EXCELLENT SENSITIVITY, RESOLUTION, PATTERN FORMATION, REMOVAL OF RESIDUE, PHYSICAL PROPERTIES, AND RELIABILITY

PHENOL COMPOUND CAPABLE OF PROMOTING DEVELOPMENT DUE TO ALKALINE DEVELOPER, AND A POSITIVE TYPE PHOTOSENSITIVE COMPOSITION WITH EXCELLENT SENSITIVITY, RESOLUTION, PATTERN FORMATION, REMOVAL OF RESIDUE, PHYSICAL PROPERTIES, AND RELIABILITY

机译:具有碱性开发能力的苯酚化合物,具有促进发展的潜力,并且具有良好的灵敏度,分辨率,图案形成,残留物,物理性质和可靠性的正型光敏组合物

摘要

PURPOSE: A positive type photosensitive composition is provided to improve physical properties and reliability of a membrane, and to boating excellent sensitivity, resolution, pattern formation, removal of residue, high elongation, high tensile strength, and low membrane shrinkage.;CONSTITUTION: A phenol compound comprises one selected from a group consisting of a compound in chemical formula 1, a compound in chemical formula 2, and combinations thereof. A positive type photosensitive composition comprises 100.0 parts by weight of polybenzoxazole precursor, 5-100 parts by weight of a photosensitive diazoquinone compound, 1-30 parts by weight of a phenol compound, 0.1-30 parts by weight of a silane compound, and 50-300 parts by weight of a solvent. The polybenzoxazole precursor has the weight average molecular weight of 3,000-300,000.;COPYRIGHT KIPO 2012
机译:目的:提供一种正型光敏组合物,以改善膜的物理性能和可靠性,并划船具有出色的灵敏度,分辨率,图案形成,残留物去除,高伸长率,高拉伸强度和低膜收缩性。酚化合物包括选自化学式1的化合物,化学式2的化合物及其组合中的一种。正型感光性组合物包含100.0重量份的聚苯并恶唑前体,5-100重量份的感光性重氮醌化合物,1-30重量份的酚化合物,0.1-30重量份的硅烷化合物和50 -300重量份的溶剂。聚苯并恶唑前体的重均分子量为3,000-300,000。; COPYRIGHT KIPO 2012

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