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METHOD FOR MANUFACTURING A RESISTANCE CHANGEABLE MEMORY DEVICE INCLUDING A PLURALITY OF RESISTANCE CHANGEABLE MATERIAL PATTERNS
METHOD FOR MANUFACTURING A RESISTANCE CHANGEABLE MEMORY DEVICE INCLUDING A PLURALITY OF RESISTANCE CHANGEABLE MATERIAL PATTERNS
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机译:制造包括多种电阻变化材料图案的电阻变化存储器的方法
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摘要
PURPOSE: A method for manufacturing a resistance changeable memory device is provided to improve the stability and reliability of a resistance changeable memory device by doping a resistance changeable material pattern confined by a contact hole with at least one element among a plurality of elements comprising the resistance changeable material pattern. CONSTITUTION: A bottom electrode(160) is formed on a substrate(110). An insulation layer(170) including a first opening unit(175) is formed on the substrate. The first opening unit is filled with a resistance changeable material pattern(180). The resistance changeable material pattern is doped with dopants. A top electrode(200) is formed on the resistance changeable material pattern.
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