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METHOD FOR MANUFACTURING A RESISTANCE CHANGEABLE MEMORY DEVICE INCLUDING A PLURALITY OF RESISTANCE CHANGEABLE MATERIAL PATTERNS

机译:制造包括多种电阻变化材料图案的电阻变化存储器的方法

摘要

PURPOSE: A method for manufacturing a resistance changeable memory device is provided to improve the stability and reliability of a resistance changeable memory device by doping a resistance changeable material pattern confined by a contact hole with at least one element among a plurality of elements comprising the resistance changeable material pattern. CONSTITUTION: A bottom electrode(160) is formed on a substrate(110). An insulation layer(170) including a first opening unit(175) is formed on the substrate. The first opening unit is filled with a resistance changeable material pattern(180). The resistance changeable material pattern is doped with dopants. A top electrode(200) is formed on the resistance changeable material pattern.
机译:目的:提供一种用于制造可变电阻存储装置的方法,以通过在由电阻构成的多个元件中的至少一个元素中掺杂由接触孔限制的可变电阻材料图案,从而提高可变电阻存储装置的稳定性和可靠性。可变的材料样式。组成:底部电极(160)形成在基板(110)上。包括第一开口单元(175)的绝缘层(170)形成在基板上。第一开口单元填充有可变电阻材料图案(180)。可变电阻材料图案掺杂有掺杂剂。顶部电极(200)形成在电阻可变材料图案上。

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