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METHOD FOR CALCULATING A REGISTRY PATTERN CAPABLE OF ENHANCING THE CALCULATION ACCURACY OF THE REGISTRY PATTERN AND A CALCULATION PROGRAM STORAGE MEDIA THEREOF
METHOD FOR CALCULATING A REGISTRY PATTERN CAPABLE OF ENHANCING THE CALCULATION ACCURACY OF THE REGISTRY PATTERN AND A CALCULATION PROGRAM STORAGE MEDIA THEREOF
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机译：计算能够增强注册码的计算精度的注册码的方法及其计算程序存储介质
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摘要
PURPOSE: A method for calculating a registry pattern and a calculation program storage media thereof are provided to calculate the registry pattern considering the effect of aberration generated by a projection optical system.;CONSTITUTION: A representative light intensity which represents the light intensity in a predetermined size of area is calculated for each point by using a calculated optical intensity distribution or convoluted optical intensity distribution(S404). The area includes a regulated point in an area of the registry. A correction function with a first function is added to the convoluted optical intensity distribution. The convoluted optical intensity distribution is corrected(S405). A registry pattern is calculated by the corrected optical intensity distribution and a predetermined slice level(S406,S407).;COPYRIGHT KIPO 2012
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