首页> 外国专利> PROGRAMMABLE ARRAY OF SILICON NANOWIRE METAL-OXIDE-SILICON FIELD EFFECT TRANSISTOR DEVICE AND PREPARATION METHOD THEREFOR

PROGRAMMABLE ARRAY OF SILICON NANOWIRE METAL-OXIDE-SILICON FIELD EFFECT TRANSISTOR DEVICE AND PREPARATION METHOD THEREFOR

机译:硅纳米金属氧化物硅场效应晶体管器件的可编程阵列及其制备方法

摘要

Provided are a hexagonal programmable array of a silicon nanowire metal-oxide-silicon field effect transistor and a preparation method therefor. The array includes a nanowire device, a nanowire device connection area and a gate connection area, wherein the nanowire device has a cylindrical structure and includes a silicon nanowire channel, a gate dielectric layer and a gate area, with the gate dielectric layer wrapping the silicon nanowire channel and the gate area wrapping the gate dielectric layer, and the nanowire devices are arranged hexagonally so as to form a unit, with the nanowire device connection area being a connection node among three nanowire devices and fixed on a silicon support. The present invention can realize complicated interconnected control logic, and suitable for being applied in high speed and highly integrated digital/analogue circuits and digital and analogue hybrid circuits.
机译:提供了一种硅纳米线金属氧化物硅场效应晶体管的六边形可编程阵列及其制备方法。该阵列包括纳米线器件,纳米线器件连接区域和栅极连接区域,其中,纳米线器件具有圆柱形结构,并且包括硅纳米线沟道,栅极介电层和栅极区域,其中栅极介电层包裹硅。纳米线沟道和包裹栅极电介质层的栅极区域以及纳米线器件以六边形排列以形成一个单元,其中纳米线器件连接区是三个纳米线器件之间的连接节点,并固定在硅载体上。本发明可以实现复杂的互连控制逻辑,适用于高速,高度集成的数字/模拟电路以及数字和模拟混合电路。

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