METHOD FOR MANUFACTURING MICROCRYSTALLINE SILICON FILM, MICROCRYSTALLINE SILICON FILM, ELECTRIC ELEMENT, AND DISPLAY DEVICE

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  机译： 微晶硅膜的形成方法，微晶硅膜沉积装置和显示装置

• 4. Production process of the amorphous silicon film, method of manufacturing an amorphous silicon nitride film, method of manufacturing the microcrystalline silicon film, and the non-single crystal semiconductor device [P] . 日本专利： JP3201492B2 . 2001-08-20

  机译： 非晶硅膜的制造工艺，非晶硅氮化膜的制造方法，微晶硅膜的制造方法以及非单晶半导体装置

• 5. Method for manufacturing microcrystalline silicon film, method for manufacturing semiconductor device, and method for manufacturing photoelectric conversion device [P] . 日本专利： JP3907726B2 . 2007-04-18

  机译： 微晶硅膜的制造方法，半导体装置的制造方法以及光电转换装置的制造方法

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• 1. Stability of thin films of microcrystalline silicon under ligh tsoaking [J] . HAN Xiao-yan ,Wang Yan ,XUE Jun-ming . 光电子快报：英文版 . 2006,第1期
• 2. SUBSTRATE EFFECT ON HYDROGENATED MICROCRYSTALLINE SILICON FILMS DEPOSITED WITH VHF-PECVD TECHNIQUE [J] . H.D. Yang . 金属学报：英文版 . 2006,第4期
• 3. STRUCTURAL PROPERTIES INVESTIGATION ON MICROCRYSTALLINE SILICON FILMS DEPOSITED WITH VHF-PECVD TECHNIQUE [J] . H.D.Yang . 金属学报：英文版 . 2005,第3期
• 4. 退火隔离剂优良且玻璃膜和磁性能均优良的取向电磁钢板的制造方法 [C] . 新日铁 . 第九届全国电工钢专业学术年会 . 2006
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