ASSEMBLY FOR VACUUM CUP HAVING LEVEL CORRECTION FUNCTION

• 1. 一种具有自动水平校正功能的激光水平仪 [P] . 中国专利： CN214039988U . 2021-08-24
• 2. 具有真空指示功能的真空杯 [P] . 中国专利： CN207101054U . 2018.03.16
• 3. ASSEMBLY FOR VACUUM CUP HAVING LEVEL CORRECTION FUNCTION [P] . 世界知识产权组织专利： WO2012086949A2 . 2012-06-28

  机译： 具有水平校正功能的真空杯组件

• 4. VACUUM CUP ASSEMBLY HAVING A LEVEL CORRECTION FUNCTION FOR RAPIDLY REMOVING AN ABSORPTION PAD [P] . 韩国专利： KR101068954B1 . 2011-09-29

  机译： 真空杯组件具有水平校正功能，可快速去除吸附垫

• 5. Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element [P] . 美国专利： US9543171B2 . 2017-01-10

  机译： 半导体衬底支撑组件的温度控制板上的故障热控制元件的自动校正，包括去激活故障热控制元件并修改至少一个起作用的热控制元件的功率水平

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• 1. Determination of Correction Values of Operating Reliability of Assembly Components of the Assembly—Front Spinner Spinning Box (R1 Rieter) on the Basis of Operating Data [J] . Slobodan Stefanović ,Korabayev Sherzod Ahmadjonovich ,Shoxobiddinova Dilafruz Erkinzonqizi . 工程(英文)(1947-3931) . 2021,第11期
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