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METHOD FOR PREPARING METAL NANOPARTICLE ARRAY WITH MICRO NUMBER DENSITY OR DIMENSION GRADIENT
METHOD FOR PREPARING METAL NANOPARTICLE ARRAY WITH MICRO NUMBER DENSITY OR DIMENSION GRADIENT
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机译：具有微数密度或维数梯度的金属纳米粒子阵列的制备方法
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摘要
Disclosed is a method for preparing a metal nanoparticle array with micro number density or dimension gradient, which comprises: (a) sticking a mask on a substrate coated with a polymer film or an amorphous carbon film, and fixing the substrate on a pedestal; (b) mounting the pedestal in a high vacuum deposition chamber and positioning the substrate in the center of a metal nanoparticle beam; (c) generating metal target nanoparticles from a gas aggregation cluster beam source and forming a collimated nanoparticle beam which is highly oriented and the equivalent deposition rate thereof can be accurately controlled as the nanoparticles pass a nozzle along with a buffer gas; and (d) rotating the substrate and carrying out a beam deposition, controlling the rotation angle range and rotation mode to prepare nanoparticle array with continuous gradient or stepwise gradient.
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