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HIGHLY EFFICIENT PLASMONIC DEVICES, MOLECULE DETECTION SYSTEMS, AND METHODS OF MAKING THE SAME

机译:高效等离子设备,分子检测系统及其制造方法

摘要

A plasmonic device has a plurality of nanostructures extending from a substrate. Each of the plurality of nanostructures preferably includes a core, a coating of intermediate material covering at least a portion of the core, and a coating of a plasmonic material. Devices are preferably manufactured using lithography to create the cores, and Plasma Enhanced Chemical Vapor Deposition (PECVD) to deposit the intermediate and/or plasmonic materials. Cores can be arranged in any suitable pattern, including one-dimensional or two-dimensional patterns. Devices can be used in airborne analyte detectors, in handheld roadside controlled substance detectors, in genome sequencing device, and in refraction detectors.
机译:等离子体装置具有从基底延伸的多个纳米结构。多个纳米结构中的每一个优选地包括核,覆盖核的至少一部分的中间材料的涂层以及等离激元材料的涂层。装置优选地使用光刻技术制造以形成芯,并且使用等离子体增强化学气相沉积(PECVD)制造以沉积中间和/或等离子体材料。芯可以以任何合适的图案布置,包括一维或二维图案。该设备可用于空中分析物检测器,手持路边受控物质检测器,基因组测序设备和折射检测器。

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